DEPOSITION AND PROPERTY CHARACTERISATION OF TaN COATINGS DEPOSITED WITH DIFFERENT NITROGEN CONTENTS
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This work focused on the study of the influence of nitrogen content on the microstructure, chemical composition, mechanical and tribological properties of TaN coatings deposited on 420 stainless steel and silicon samples (100) using the magnetron sputtering technique. For the deposition of the TaN coatings an argon/nitrogen atmosphere was used, varying the flux of nitrogen between 12% and 25%. For coating’s characterization, Scanning electron microscopy, Energy dispersive X-ray spectroscopy, Atomic force microscopy, X-Ray diffraction, Microraman spectroscopy, Micro-hardness tester and a ball on disc tribometer were used. A refining of the columnar structure of the coatings, accompanied by a decrease in their thickness with the increased n... Ver más
1794-1237
2463-0950
13
2016-10-25
69
80
Revista EIA/ English version - 2016
info:eu-repo/semantics/openAccess
http://purl.org/coar/access_right/c_abf2